Title: Transverse-momentum-dependent parton distribution function in soft-collinear effective theory

Abstract: Transverse-momentum-dependent parton distribution functions are analyzed in semi-inclusive deep inelastic scattering at low transverse momentum using soft-collinear effective theory. The transverse-momentum-dependent parton distribution functions are defined on the lightcone without distorting the lightcone path nor adding additional soft Wilson lines. In this approach, the comparison between the integrated and unintegrated parton distribution functions becomes transparent. The procedure of computing radiative corrections in dimensional regularization is explained in detail, and the divergence, which is a product of infrared and ultraviolet divergence, is cancelled. The renormalization group equation for the transverse-momentum-dependent parton distribution functions is derived. It depends only on the relevant physical quantities and exhibits a nontrivial scaling behavior because the longitudinal momentum fraction and the transverse momentum are coupled in the renormalization group equation.