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Condensed Matter > Materials Science
Title: Elastocapillary folding using stop-programmable hinges fabricated by 3D micro-machining
(Submitted on 7 Oct 2014 (v1), last revised 7 Nov 2014 (this version, v2))
Abstract: We show elasto-capillary folding of silicon nitride objects with accurate folding angles between flaps of 70.6$\pm$0.1{\deg} and demonstrate the feasibility of such accurate micro-assembly with a final folding angle of 90{\deg}. The folding angle is defined by stop-programmable hinges that are fabricated starting from silicon molds employing accurate three-dimensional corner lithography. This nano-patterning method exploits the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as an inversion mask in subsequent steps. Hinges designed to stop the folding at 70.6{\deg} were fabricated batchwise by machining the V-grooves obtained by KOH etching in (110) silicon wafers; 90{\deg} stop-programmable hinges were obtained starting from silicon molds obtained by dry etching on (100) wafers. The presented technique is applicable to any folding angle and opens a new route towards creating structures with increased complexity, which will ultimately lead to a novel method for device fabrication.
Submission history
From: Antoine Legrain [view email][v1] Tue, 7 Oct 2014 15:18:12 GMT (8575kb,D)
[v2] Fri, 7 Nov 2014 12:41:54 GMT (8273kb,D)
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