Title: Large cooperativity and microkelvin cooling with a 3D optomechanical cavity

Abstract: In cavity optomechanics, electromagnetic fields are used to detect and control the motion of mechanical resonators potentially down to the quantum limit. A current central goal of the field is to reach the limit of single-photon strong coupling, which would enable the creating quantum superposition states of mechanical motion. Reaching this limit requires significant improvements in optomechanical coupling and cavity coherence, and remains inaccessible in current implementations. Here, we introduce a new optomechanical architecture consisting of a silicon-nitride membrane coupled to a three-dimensional superconducting microwave cavity. Exploiting the large quality-factors of both the membrane and cavity, we achieve a cooperativity, a dimensionless measure of optomechanical coupling, of $C = 146,000$. Using this large cooperativity, we perform sideband cooling of the motion of the kilohertz frequency membrane to an occupation of $5.2\pm0.7$ phonons, corresponding to a temperature of $34\pm5$ $\mu$K, the lowest mechanical mode temperature reported to date. Furthermore, we find that the coooling is limited only by the classical noise of our signal generator, and should extend deep into the quantum ground state with a tunable superconducting cavity filter to improve the spectral purity of the cooling tone. Our results suggest that this new realisation of optomechanics has the potential to reach the regimes of ultra-large cooperativity and single-photon strong coupling, opening up a new generation of experiments.