Title: Optical plasma microelectronic devices

Abstract: The semiconductor channel in conventional microelectronic devices was successfully replaced with an optically triggered gas plasma channel. The combination of DC and laser-induced gas ionizations controls the conductivity of the channel, enabling us to realize different electronic devices such as transistors, switches, modulators, etc. A special micro-scale metasurface was used to enhance the laser-gas interaction, as well as combining it with DC ionization properly. Optical plasma devices benefit form the advantages of plasma/vacuum electronic devices while preserving most of the integrablity of semiconductor based devices.