Current browse context:
physics.ins-det
Change to browse by:
References & Citations
Physics > Instrumentation and Detectors
Title: High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors
(Submitted on 15 Dec 2015 (v1), last revised 24 May 2016 (this version, v3))
Abstract: Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS solutions.
Submission history
From: Matthias Imboden [view email][v1] Tue, 15 Dec 2015 19:23:57 GMT (2381kb)
[v2] Thu, 11 Feb 2016 15:02:07 GMT (5880kb)
[v3] Tue, 24 May 2016 18:47:40 GMT (3806kb)
Link back to: arXiv, form interface, contact.