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Astrophysics > Instrumentation and Methods for Astrophysics
Title: Stacked Wafer Gradient Index Silicon Optics with Integral Anti-reflection Layers
(Submitted on 13 Feb 2018 (v1), last revised 18 Jun 2018 (this version, v2))
Abstract: Silicon optics with wide bandwidth anti-reflection (AR) coatings, made of multi-layer textured silicon surfaces, are developed for millimeter and submillimeter wavelengths. Single and double layer AR coatings were designed for an optimal transmission centered on 250 GHz, and fabricated using the DRIE (Deep Reaction Ion Etching) technique. Tests of high resistivity silicon wafers with single-layer coatings between 75 GHz and 330 GHz are presented and compared with the simulations.
Submission history
From: Fabien Defrance [view email][v1] Tue, 13 Feb 2018 20:53:30 GMT (11641kb,D)
[v2] Mon, 18 Jun 2018 22:57:11 GMT (11641kb,D)
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