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Physics > Applied Physics
Title: A Ferroelectric Semiconductor Field-Effect Transistor
(Submitted on 7 Dec 2018 (this version), latest version 9 Jan 2020 (v2))
Abstract: A ferroelectric semiconductor field-effect transistor (FeS-FET) was proposed and experimentally demonstrated for the first time. In this novel FeS-FET, a two-dimensional (2D) ferroelectric semiconductor {\alpha}-In$_2$Se$_3$ is used to replace conventional semiconductor as channel. {\alpha}-In$_2$Se$_3$ is identified due to its proper bandgap, room temperature ferroelectricity, the ability to maintain ferroelectricity down to a few atomic layers and the feasibility for large-area growth. An atomic-layer deposition (ALD) Al$_2$O$_3$ passivation method was developed to protect and enhance the performance of the {\alpha}-In$_2$Se$_3$ FeS-FETs. The fabricated FeS-FETs exhibit high performance with a large memory window, a high on/off ratio over 10$^8$, a maximum on-current of 671 {\mu}A/{\mu}m, high electron mobility of 488 cm$^2$/V$\cdot$s, and the potential to exceed the existing Fe-FETs for non-volatile memory applications.
Submission history
From: Mengwei Si [view email][v1] Fri, 7 Dec 2018 07:39:45 GMT (1403kb)
[v2] Thu, 9 Jan 2020 18:43:39 GMT (5468kb)
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