Title: Defect-free assembly of 2D clusters of more than 100 single-atom quantum systems

Abstract: We demonstrate the defect-free assembly of versatile target patterns of up 111 neutral atoms, building on a 361-site subset of a micro-optical architecture that readily provides thousands of sites for single-atom quantum systems. By performing up to 80 assembly cycles in rapid succession, we drastically increase achievable structure sizes and success probabilities. We implement repeated target pattern reconstruction after atom loss and deterministic transport of partial atom clusters necessary for distributing entanglement in large-scale systems. This technique will propell assembled-atom architectures beyond the threshold of quantum advantage and into a regime with abundant applications in quantum sensing and metrology, Rydberg-state mediated quantum simulation, and error-corrected quantum computation.