Title: Atomic-level Characterisation of Quantum Computer Arrays by Machine Learning

Abstract: Atomic level qubits in silicon are attractive candidates for large-scale quantum computing, however, their quantum properties and controllability are sensitive to details such as the number of donor atoms comprising a qubit and their precise location. This work combines machine learning techniques with million-atom simulations of scanning-tunnelling-microscope (STM) images of dopants to formulate a theoretical framework capable of determining the number of dopants at a particular qubit location and their positions with exact lattice-site precision. A convolutional neural network was trained on 100,000 simulated STM images, acquiring a characterisation fidelity (number and absolute donor positions) of above 98\% over a set of 17,600 test images including planar and blurring noise. The method established here will enable a high-precision post-fabrication characterisation of dopant qubits in silicon, with high-throughput potentially alleviating the requirements on the level of resource required for quantum-based characterisation, which may be otherwise a challenge in the context of large qubit arrays for universal quantum computing.