Title: Near-unity indistinguishability single photon source for large-scale integrated quantum optics

Abstract: Integrated single photon sources are key building blocks for realizing scalable devices for quantum information processing. For such applications highly coherent and indistinguishable single photons on a chip are required. Here we report on a triggered resonance fluorescence single photon source based on In(Ga)As/GaAs quantum dots coupled to single- and multi-mode ridge waveguides. We demonstrate the generation of highly linearly polarized resonance fluorescence photons with 99.1% (96.0%) single-photon purity and 97.5% (95.0%) indistinguishability in case of multi-mode (single-mode) waveguide devices fulfilling the strict requirements imposed by multi-interferometric quantum optics applications. Our integrated triggered single photon source can be readily scaled up, promising a realistic pathway for on-chip linear optical quantum simulation, quantum computation and quantum networks.