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Physics > Applied Physics

Title: Free-standing silicon shadow masks for transmon qubit fabrication

Abstract: Nanofabrication techniques for superconducting qubits rely on resist-based masks patterned by electron-beam or optical lithography. We have developed an alternative nanofabrication technique based on free-standing silicon shadow masks fabricated from silicon-on-insulator wafers. These silicon shadow masks not only eliminate organic residues associated with resist-based lithography, but also provide a pathway to better understand and control surface-dielectric losses in superconducting qubits by decoupling mask fabrication from substrate preparation. We have successfully fabricated aluminum 3D transmon superconducting qubits with these shadow masks and found coherence quality factors comparable to those fabricated with standard techniques.
Comments: 6 pages, 6 figures, additional experimental data - new figure, typos corrected, supplementary material (2 pages, 1 figure, 1 table)
Subjects: Applied Physics (physics.app-ph); Quantum Physics (quant-ph)
Journal reference: AIP Advances 10, 065120 (2020)
DOI: 10.1063/1.5138953
Cite as: arXiv:1911.05924 [physics.app-ph]
  (or arXiv:1911.05924v2 [physics.app-ph] for this version)

Submission history

From: Ioannis Tsioutsios [view email]
[v1] Thu, 14 Nov 2019 03:56:31 GMT (1138kb,D)
[v2] Sun, 16 Aug 2020 02:04:26 GMT (1143kb,D)

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