Title: Near source fluorescence spectroscopy for miniaturized thermal atomic beams

Abstract: Miniature atomic beams can provide new functionalities for atom based sensing instruments such as atomic clocks and interferometers. We recently demonstrated a planar silicon device for generating well-collimated thermal atomic beams [Nat Commun 10, 1831 (2019)]. Here, we present a near-source fluorescence spectroscopy (NSFS) technique that can fully characterize such miniature beams even when measured only a few millimeters from the nozzle exit. We also present a recipe for predicting the fluorescence spectrum, and therefore, the source angular distribution, even under conditions of strong laser saturation of the probing transition. Monte Carlo simulations together with multi-level master equation calculations fully account for the influence of optical pumping and spatial extension of the Gaussian laser beam. A notable consequence of this work is the agreement between theory and experimental data that has allowed fine details of the angular distribution of the collimator to be resolved over 3 decades of dynamic range of atomic beam output flux.