Title: Plasmonic Nanoslit Arrays Fabricated by Serial Bideposition: Optical and Surface-Enhanced Raman Scattering Study

Abstract: Recently, studies have been carried out on attempts to combine surface-enhanced Surface-enhanced Raman spectroscopy (SERS) substrates that can be based on either localized surface plasmon (LSP) or surface plasmon polaritons (SPP) structures. By combining these two systems, the drawbacks of each other can be solved. However, the manufacturing methods involved so far are sophisticated, labor-intensive, expensive, and also technically demanding. We propose a facile method for the fabrication of a flexible plasmonic nanoslit SERS sensor. We utilized the pattern on periodic optical disks (DVD-R) as a cheap substitute for printing the periodic pattern on PDMS with soft imprint lithography. Ag nanoslit (AgNS) was fabricated by serial bideposition using a dynamic oblique angle deposition (DOD) technique. The nanoslit structures were physically and optically characterized, and the experimental results were compared to the numerical simulation studies; Monte Carlo and the finite-difference time-domain (FDTD) simulation. The Ag nanoslit structure showed an excellent SERS enhancement, and its biosensing capability was demonstrated by the sensing of bilirubin.