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Physics > Optics

Title: Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference

Abstract: High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovoltaics and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the pre-deposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication paves the way towards a simple realization of spatially invariant metasurface-based devices.
Subjects: Optics (physics.optics); Materials Science (cond-mat.mtrl-sci); Applied Physics (physics.app-ph)
Journal reference: ACS Nano 2020, 14, 5, 6138-6149
DOI: 10.1021/acsnano.0c01993
Cite as: arXiv:2003.03457 [physics.optics]
  (or arXiv:2003.03457v1 [physics.optics] for this version)

Submission history

From: Jonas Berzins [view email]
[v1] Fri, 6 Mar 2020 22:20:14 GMT (3293kb,D)

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