Title: High-fidelity Two-qubit Gates Using a MEMS-based Beam Steering System for Individual Qubit Addressing

Abstract: In a large scale trapped atomic ion quantum computer, high-fidelity two-qubit gates need to be extended over all qubits with individual control. We realize and characterize high-fidelity two-qubit gates in a system with up to 4 ions using radial modes. The ions are individually addressed by two tightly focused beams steered using micro-electromechanical system (MEMS) mirrors. We deduce a gate fidelity of 99.49(7)% in a two-ion chain and 99.30(6)% in a four-ion chain by applying a sequence of up to 21 two-qubit gates and measuring the final state fidelity. We characterize the residual errors and discuss methods to further improve the gate fidelity towards values that are compatible with fault-tolerant quantum computation.