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Condensed Matter > Materials Science

Title: Correlating surface stoichiometry and termination in SrTiO$_{3}$ films grown by hybrid molecular beam epitaxy

Abstract: Hybrid oxide molecular beam epitaxy (hMBE), a thin-film deposition technique in which transition metal cations are delivered using a metal-organic precursor, has emerged as the state-of-the-art approach to the synthesis of electronic-grade complex oxide films with a stoichiometric growth window. However, numerous questions remain regarding the chemical mechanisms of the growth process and the surface properties of the resulting films. To examine these properties, thin film SrTiO$_{3}$ (STO) was prepared by hMBE using a titanium tetraisopropoxide (TTIP) precursor for Ti delivery and an elemental Sr source on annealed STO and Nb-doped STO substrates with varying TTIP:Sr flux ratios to examine the conditions for the reported stoichiometric growth window. The grown films were transferred to an appended x-ray photoelectron spectroscopy (XPS) system under ultrahigh vacuum to study the surface elemental composition in the STO samples. Low energy electron diffraction and microscopy (LEED/LEEM) measurements were also performed to correlate the XPS data with the surface termination. Also, samples were examined using x-ray diffraction (XRD) in order to compare our surface sensitive results with previously reported measurements of the bulk of the films in the literature. We find that a surface exhibiting a mixture of SrO and TiO$_{2}$ termination, or a full SrO termination is necessary to obtain stoichiometric adsorption-controlled step-flow growth. These results indicate that surface Sr is necessary to maintain chemical equilibrium These results can open new opportunities for the study of interfacial structures synthesized via hMBE.
Comments: 13 pages, 5 figures, 5 supplemental figures
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:2004.00069 [cond-mat.mtrl-sci]
  (or arXiv:2004.00069v1 [cond-mat.mtrl-sci] for this version)

Submission history

From: Ryan Comes [view email]
[v1] Tue, 31 Mar 2020 19:31:13 GMT (1563kb)

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