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Condensed Matter > Materials Science
Title: Temperature-Dependent Resistivity of Alternative Metal Thin Films
(Submitted on 28 Apr 2020 (v1), last revised 2 Jul 2020 (this version, v3))
Abstract: The temperature coefficients of the resistivity (TCR) of Cu, Ru, Co, Ir, and W thin films have been investigated as a function of film thickness below 10 nm. Ru, Co, and Ir show bulk-like TCR values that are rather independent of the thickness whereas the TCR of Cu increases strongly with decreasing thickness. Thin W films show negative TCR values, which can be linked to high disorder. The results are qualitatively consistent with a temperature-dependent semiclassical thin film resistivity model that takes into account phonon, surface, and grain boundary scattering.
Submission history
From: Christoph Adelmann [view email][v1] Tue, 28 Apr 2020 21:20:43 GMT (1767kb,D)
[v2] Sun, 24 May 2020 11:58:35 GMT (1767kb,D)
[v3] Thu, 2 Jul 2020 13:19:42 GMT (1783kb,D)
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