Title: A novel direct structured-light inspection technique for contaminant and defect detection

Abstract: The Direct Structured-Light Inspection Technique (DSIT) proposed in this paper is a novel method that can be implemented under two types of binary structured light illumination to detect contaminants and defects on specular surfaces and transparent objects, in which light reflection system is used to detect specular surfaces, while light transmission system is applied for transparent object inspection. Based on this technique, contaminant and defect distribution can be directly obtained without any calculation process. Relevant simulations and experiments are performed to prove the effectiveness of DSIT.