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Condensed Matter > Materials Science

Title: Nanoscale structural and electrical properties of graphene grown on AlGaN by catalyst-free chemical vapor deposition

Abstract: The integration of graphene (Gr) with nitride semiconductors is highly interesting for applications in high-power/high-frequency electronics and optoelectronics. In this work, we demonstrated the direct growth of Gr on Al0.5Ga0.5N/sapphire templates by propane (C3H8) chemical vapor deposition (CVD) at temperature of 1350{\deg}C. After optimization of the C3H8 flow rate, a uniform and conformal Gr coverage was achieved, which proved beneficial to prevent degradation of AlGaN morphology. X-ray photoemission spectroscopy (XPS) revealed Ga loss and partial oxidation of Al in the near-surface AlGaN region. Such chemical modification of a 2 nm thick AlGaN surface region was confirmed by cross-sectional scanning transmission electron microscopy (STEM) combined with electron energy loss spectroscopy (EELS), which also showed the presence of a bilayer of Gr with partial sp2/sp3 hybridization. Raman spectra indicated that the deposited Gr is nanocrystalline (with domain size 7 nm) and compressively strained. A Gr sheet resistance of 15.8 kOhm/sq was evaluated by four-point-probe measurements, consistently with the nanocrystalline nature of these films. Furthermore, nanoscale resolution current mapping by conductive atomic force microscopy (C-AFM) indicated local variations of the Gr carrier density at a mesoscopic scale, which can be ascribed to changes in the charge transfer from the substrate due to local oxidation of AlGaN or to the presence of Gr wrinkles.
Comments: 20 pages, 8 figures
Subjects: Materials Science (cond-mat.mtrl-sci)
Journal reference: Nanotechnology 32 (2020) 015705
DOI: 10.1088/1361-6528/abb72b
Cite as: arXiv:2009.08673 [cond-mat.mtrl-sci]
  (or arXiv:2009.08673v1 [cond-mat.mtrl-sci] for this version)

Submission history

From: Filippo Giannazzo [view email]
[v1] Fri, 18 Sep 2020 07:53:27 GMT (1049kb)

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