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Condensed Matter > Materials Science

Title: A High Throughput Study of both Compositionally Graded and Homogeneous Fe-Pt Thin Films

Abstract: Compositionally graded Fe-Pt thin films were prepared on stationary 100 mm Si substrates by magnetron sputtering a base target of Fe on which a piece of Pt is asymmetrically positioned. Energy Dispersive X-Ray analysis was used to map the variation in film composition across the substrate, as a function of the size of the Pt piece. A scanning polar Magneto-Optical-Kerr-Effect system was used to probe the influence of composition and post-deposition annealing conditions (temperature and time) on coercivity. In this way the maximum coercivity achievable for the sputtering system used could be established in a high throughput fashion. The evolution in coercivity with composition was correlated with the formation of L10 FePt and changes in its lattice parameters, as determined by scanning X-ray diffraction. High throughput coercivity mapping was then carried out on homogeneous Fe-Pt thin films of different composition treated to different annealing conditions. This study serves as a step towards the integration of coercive FePt films into collectively fabricated devices.
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:2111.00366 [cond-mat.mtrl-sci]
  (or arXiv:2111.00366v1 [cond-mat.mtrl-sci] for this version)

Submission history

From: Yuan Hong [view email]
[v1] Sun, 31 Oct 2021 00:01:13 GMT (1381kb)

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