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Physics > Applied Physics
Title: Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits
(Submitted on 2 Nov 2021 (v1), last revised 24 Sep 2022 (this version, v2))
Abstract: Local laser oxidation of a thin titanium film is considered as a means of a precise adjustment of losses and effective refractive index of dielectric optical waveguides. A fine phase control of an operating point and extinction ratio enhancement up to 57 dB were demonstrated using an integrated optical Ti:LiNbO3 Mach-Zehnder modulator. This technique only slightly affects the dielectric waveguide material and is very promising for a high precision permanent trimming of photonic devices based on dielectric waveguides of different material platforms and fabrication technologies.
Submission history
From: Aleksandr Tronev [view email][v1] Tue, 2 Nov 2021 14:17:59 GMT (15783kb)
[v2] Sat, 24 Sep 2022 11:51:22 GMT (1241kb)
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