Title: Beamforming using Digital Piezoelectric MEMS Microphone Array

Abstract: The recent explosion in low-cost, low-power wireless microcontrollers, coupled with low-power, robust MEMS sensors has opened up the opportunity to create new forms of low-cost Industrial Internet-of-Things (IIoT) devices for condition monitoring. Piezoelectric MEMS microphones constructed with a cantilever diaphragm are a potential solution against failure modes, such as water and dust ingress, that have challenged the use of capacitive MEMS microphones in industrial applications. In this paper, we couple a pair of piezoelectric MEMS microphones to a COTS microcontroller to create a stand-alone microphone array capable of discerning the direction of a noise source. The microphone array is designed to acquire sound data without aliasing at frequencies of 2000 Hz or below. Testing is conducted in an anechoic chamber. We compare the performance of this microphone array to a simple idealized theoretical model. The experimental results obtained in the anechoic chamber compare well with the theoretical model. The work stands as a proof-of-principle. By providing detailed information on how we coupled the sensors to a COTS microcontroller, and the open-source code used to process the data, we hope that others will be able to build upon this work by expanding on both the number and type of sensors used.