Title: Fundamentals of Scanning Surface Structuring by Ultrashort Laser Pulses: From Electron Diffusion to Final Morphology

Abstract: Industrial use of ultrashort-pulse surface structuring would significantly increase by an effective utilization of the average laser powers available currently. However, the unexplained degradation of surfaces processed with numerous pulses at high average laser power makes this difficult. Based on a systematic experimental study, the structure formation underlying such surface degradation was investigated. We presented a hierarchical structural formation model that bridges the gap between laser-induced periodic surface structures and surface degradation. Contrary to expectations based on previous research, we observed less structure formation on titanium for high laser fluences. As a possible reason, enhanced electron diffusion with increasing intensity was investigated within the framework of the two-temperature model. Our findings provide a deeper understanding of the microscopic mechanisms involved in surface structuring with ultrashort pulses.