Title: Intrinsic mechanisms of the superconducting transition broadening in epitaxial TiN films

Abstract: We investigate the impact of various fluctuation mechanisms on the dc resistance at the superconducting resistive transition (RT) in epitaxial titanium nitride (TiN) films. The studied samples demonstrate a relatively steep RT with $\delta T/T_\mathrm{c}$ $\sim 0.002 - 0.025$ depending on the film thickness (20, 9, and 5\, nm) and device dimensions. The transition is significantly broader than predicted by a conventional theory of superconducting fluctuations ($\delta T/T_\mathrm{c} \ll 10^{-3}$), which can be can be tackled by the effective medium theory of RT in an inhomogeneous superconductor. We propose that the underlying inhomogeneity has intrinsic origin and manifests via two microscopic mechanisms - static and dynamic. The dynamic inhomogeneity is associated with spontaneous fluctuations of the electronic temperature ($T$-fluctuations), whereas the static one is related to random spatial distribution of surface magnetic disorder (MD) present in TiN films. Our analysis reveals distinct dependencies of the RT width on the material parameters and device dimensions for the two mechanisms, which allows to disentangle their contributions in experiment. We find that while the $T$-fluctuations may contribute a sizeable part of the measured RT width, the main effect is related to the MD mechanism, which is quantitatively consistent with the data in a wide range of sample dimensions. Given the fact that both microscopic mechanisms are almost inevitably present in real devices, our results provide a novel perspective of microscopic origin of the RT broadening and inhomogeneity in thin superconducting films.