Title: Optimization of diamond optomechanical crystal cavities

Abstract: Due to recent development of growing and processing techniques for high-quality single crystal diamond, the large scale production of diamond optomechanical crystal cavities becomes feasible, enabling optomechanical devices that can operate in higher mechanical frequencies and be coupled to two-level systems based on diamond color centers. In this paper we describe a design optimization method to produce diamond optomechanical crystal (OMC) cavities operating at the high-cooperativity regime (close to unity) at room temperature.