Title: Automated Real-Space Lattice Extraction for Atomic Force Microscopy Images

Abstract: Analyzing atomically resolved images is a time-consuming process requiring solid experience and substantial human intervention. In addition, the acquired images contain a large amount of information such as crystal structure, presence and distribution of defects, and formation of domains, which need to be resolved to understand a material's surface structure. Therefore, machine learning techniques have been applied in scanning probe and electron microscopies during the last years, aiming for automatized and efficient image analysis. This work introduces a free and open source tool (AiSurf: Automated Identification of Surface Images) developed to inspect atomically resolved images via Scale-Invariant Feature Transform (SIFT) and Clustering Algorithms (CA). AiSurf extracts primitive lattice vectors, unit cells, and structural distortions from the original image, with no pre-assumption on the lattice and minimal user intervention. The method is applied to various atomically resolved non-contact atomic force microscopy (AFM) images of selected surfaces with different levels of complexity: anatase TiO2(101), oxygen deficient rutile TiO2(110) with and without CO adsorbates, SrTiO3(001) with Sr vacancies and graphene with C vacancies. The code delivers excellent results and has proved to be robust against atom misclassification and noise, thereby facilitating the interpretation scanning probe microscopy images.