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Physics > Instrumentation and Detectors
Title: Single-shot, coherent, pop-out 3D metrology
(Submitted on 7 Sep 2022 (v1), last revised 20 Oct 2023 (this version, v3))
Abstract: Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. Here we describe a coherent imaging alternative that recovers the 3D volume of a thin, homogeneously amorphous specimen with only a single, energy-filtered, bright-field image. We demonstrated this technique with a transmission electron microscope to fill a glaring gap for rapid, accessible, non-destructive 3D nanometrology. This technique is applicable, in general, to any coherent bright field imaging with electrons, photons, or any other wavelike particles.
Submission history
From: Duane Loh [view email][v1] Wed, 7 Sep 2022 08:44:10 GMT (2605kb)
[v2] Wed, 15 Mar 2023 07:41:22 GMT (2399kb)
[v3] Fri, 20 Oct 2023 06:50:22 GMT (2284kb)
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