Title: Anomalous conductance scaling in Weyl semimetal NbAs

Abstract: Protected surface states arising from non-trivial bandstructure topology in semimetals can potentially enable new device functionalities in compute, memory, interconnect, sensing, and communication. This necessitates a fundamental understanding of surface-state transport in nanoscale topological semimetals. Here, we investigate quantum transport in a prototypical topological semimetal NbAs to evaluate the potential of this class of materials for beyond-Cu interconnects in highly-scaled integrated circuits. Using density functional theory (DFT) coupled with non-equilibrium Green's function (NEGF) calculations, we shows that the resistance-area $RA$ product in NbAs films decreases with decreasing thickness at the nanometer scale, in contrast to a nearly constant $RA$ product in ideal Cu films. This anomalous scaling originates from the disproportionately large number of surface conduction states which dominate the ballistic conductance by up to 70$\%$ in NbAs thin films. We also show that this favorable $RA$ scaling persists even in the presence of surface defects, in contrast to $RA$ sharply increasing with reducing thickness for films of conventional metals, such as Cu, in the presence of surface defects. These results underscore the promise of topological semimetals like NbAs as future back-end-of-line (BEOL) interconnect metals.