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Quantum Physics
Title: Manufacturing high-Q superconducting α-tantalum resonators on silicon wafers
(Submitted on 29 Nov 2022 (v1), last revised 30 Nov 2022 (this version, v2))
Abstract: The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric losses at different surfaces and interfaces. {\alpha}-tantalum is a superconductor that has proven effective in reducing dielectric loss and improving device performance due to its thin low-loss oxide. However, without the use of a seed layer, this tantalum phase has so far only been realised on sapphire substrates, which is incompatible with advanced processing in industry-scale fabrication facilities. Here, we demonstrate the fabrication of high-quality factor {\alpha}-tantalum resonators directly on silicon wafers over a variety of metal deposition conditions and perform a comprehensive material and electrical characterization study. By comparing experiments with simulated resonator loss, we demonstrate that two-level-system loss is dominated by surface oxide contributions and not the substrate-metal interface. Our study paves the way to large scale manufacturing of low-loss superconducting circuits and to materials-driven advancements in superconducting circuit performance.
Submission history
From: Daniel Perez Lozano [view email][v1] Tue, 29 Nov 2022 18:07:13 GMT (2596kb)
[v2] Wed, 30 Nov 2022 21:32:45 GMT (2592kb)
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