Title: Metal-Organic Chemical Vapor Deposition of PtSe2

Abstract: Platinum diselenide (PtSe2), a novel two-dimensional material from the class of noble-metal dichalcogenide (NMD), has recently received significant attention due to its outstanding properties. PtSe2, which undergoes a semi metallic to semiconductor transition when thinned, offers a band-gap in the infrared range and good air stability. These properties make it a prime active material in optoelectronic and chemical sensing devices. However, a synthesis method that can produce large-scale and reliable high quality PtSe2 is highly sought after. Here, we present PtSe2 growth by metal organic chemical vapor deposition. Films were grown on a variety of centimeter scale substrates and were characterized by Raman, X-ray photoelectron and X-ray diffraction spectroscopy, as well as scanning tunneling microscopy and spectroscopy. Domains within the films are found to be up to several hundred nanometers in size, and atomic scale measurements show their highly ordered crystalline structure. The thickness of homogenous films can be controlled via the growth time. This work provides fundamental guidance for the synthesis and implementation of high quality, large-scale PtSe2 layers, hence offering the key requirement for the implementation of PtSe2 in future electronic devices.