References & Citations
Condensed Matter > Materials Science
Title: Fabrication of Conducting Si Nanowire Arrays
(Submitted on 19 Mar 2004)
Abstract: The recent development of the superlattice nanowire pattern transfer (SNAP) technique allows for the fabrication of arrays of nanowires at a diameter, pitch, aspect ratio, and regularity beyond competing approaches. Here, we report the fabrication of conducting Si nanowire arrays with wire widths and pitches of 10-20 nm and 40-50 nm, respectively, and resistivity values comparable to the bulk through the selection of appropriate silicon-on-insulator substrates, careful reactive-ion etching, and spin-on glass doping. These results promise the realization of interesting nano-electronic circuits and devices, including chemical and biological sensors, nano-scale mosaics for molecular electronics, and ultra-dense field-effect transistor (FET) arrays.
Submission history
From: Ezekiel Johnston-Halperin [view email][v1] Fri, 19 Mar 2004 18:33:27 GMT (202kb)
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