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Condensed Matter > Materials Science

Title: Dependence of Zinc Oxide Thin Films Properties on Filtered Vacuum Arc Deposition Parameters

Authors: T. David, S. Goldsmith, R. L. Boxman
(Submitted on 17 Jan 2005)
Abstract: The micro-properties (structure and composition), and macro-properties (electrical and optical properties) of zinc oxide (ZnO) thin films deposited on glass substrates using a filtere vacuum arc deposition (FVAD) system were investigated as a function of oxygen pressure (0.37 - 0.5 Pa) and arc current (100 - 300 A). Correlations between the various properties were investigated.
Subjects: Materials Science (cond-mat.mtrl-sci)
DOI: 10.1088/0022-3727/38/14/017
Cite as: arXiv:cond-mat/0501374 [cond-mat.mtrl-sci]
  (or arXiv:cond-mat/0501374v1 [cond-mat.mtrl-sci] for this version)

Submission history

From: Tal David [view email]
[v1] Mon, 17 Jan 2005 08:27:55 GMT (332kb)
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