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Condensed Matter > Mesoscale and Nanoscale Physics

Title: Focused-ion-beam milling based nanostencil mask fabrication for spin transfer torque studies

Authors: B. Oezyilmaz, G. Richter, N. Muesgens, M. Fraune, M. Hawraneck, B. Beschoten, G. Guentherodt (Physikalisches Institut IIA, RWTH Aachen, and Virtual Institute for Spinelectronics (VISel), Aachen, Germany) M. Bueckins, J. Mayer (Gemeinschaftslabor fuer Elektronenmikroskopie, RWTH Aachen, Aachen, Germany)
Abstract: Focused-ion-beam milling is used to fabricate nanostencil masks suitable for the fabrication of magnetic nanostructures relevant for spin transfer torque studies. Nanostencil masks are used to define the device dimensions prior to the growth of the thin film stack. They consist of a wet etch resistant top layer and an insulator on top of a pre-patterned bottom electrode. The insulator supports a hard mask and gives rise to an undercut by its selective etching. The approach is demonstrated by fabricating current perpendicular to the plane Co/Cu/Co nanopillar junctions, which exhibit current-induced magnetization dynamics.
Comments: 13 pages, 3 figures, submitted to APL
Subjects: Mesoscale and Nanoscale Physics (cond-mat.mes-hall); Materials Science (cond-mat.mtrl-sci)
Journal reference: Journal of Applied Physics 101, 063920 (2007)
DOI: 10.1063/1.2711785
Cite as: arXiv:cond-mat/0512283 [cond-mat.mes-hall]
  (or arXiv:cond-mat/0512283v1 [cond-mat.mes-hall] for this version)

Submission history

From: Barbaros Özyilmaz [view email]
[v1] Tue, 13 Dec 2005 19:32:19 GMT (856kb)

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