Title: Growth of Patterned Surfaces

Abstract: During epitaxial crystal growth a pattern that has initially been imprinted on a surface approximately reproduces itself after the deposition of an integer number of monolayers. Computer simulations of the one-dimensional case show that the quality of reproduction decays exponentially with a characteristic time which is linear in the activation energy of surface diffusion. We argue that this life time of a pattern is optimized, if the characteristic feature size of the pattern is larger than $(D/F)^{1/(d+2)}$, where $D$ is the surface diffusion constant, $F$ the deposition rate and $d$ the surface dimension.