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Condensed Matter > Materials Science

Title: Silicon cantilevers locally heated from 300K up to the melting point: temperature profile measurement from their resonances frequency shift

Authors: Basile Pottier (Phys-ENS), Felipe Aguilar, Mickaël Geitner (Phys-ENS), Francisco Melo, Ludovic Bellon (Phys-ENS)
Abstract: When heated, micro-resonators present a shift of their resonance frequencies. We study specifically silicon cantilevers heated locally by laser absorption, and evaluate theoretically and experimentally their temperature profile and its interplay with the mechanical resonances. We present a enhanced version of our earlier model [F. Aguilar Sandoval et al., J. Appl. Phys. 117, 234503 (2015)] including both elasticity and geometry temperature dependency, showing that the latter can account for 20% of the observed shift for the first flexural mode. The temperature profile description takes into account thermal clamping conditions, radiation at high temperature, and lower conductivity than bulk silicon due to phonon confinement. Thanks to a space-power equivalence in the heat equation, scanning the heating point along the cantilever directly reveals the temperature profile. Finally, frequency shift measurement can be used to infer the temperature field with a few percent precision.
Subjects: Materials Science (cond-mat.mtrl-sci); Statistical Mechanics (cond-mat.stat-mech); Classical Physics (physics.class-ph); Instrumentation and Detectors (physics.ins-det)
Journal reference: Journal of Applied Physics, American Institute of Physics, 2021, 129, pp.184503
DOI: 10.1063/5.0040733
Cite as: arXiv:2012.00421 [cond-mat.mtrl-sci]
  (or arXiv:2012.00421v2 [cond-mat.mtrl-sci] for this version)

Submission history

From: Ludovic Bellon [view email]
[v1] Tue, 1 Dec 2020 11:45:08 GMT (1658kb,D)
[v2] Tue, 1 Jun 2021 14:09:53 GMT (1762kb,D)

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