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Quantum Physics

Title: In-situ bandaged Josephson junctions for superconducting quantum processors

Abstract: Shadow evaporation is commonly used to micro-fabricate the key element of superconducting qubits - the Josephson junction. However, in conventional two-angle deposition circuit topology, unwanted stray Josephson junctions are created which contribute to dielectric loss. So far, this could be avoided by shorting the stray junctions with a so-called bandage layer deposited in an additional lithography step, which may further contaminate the chip surface. Here, we present an improved shadow evaporation technique allowing one to fabricate sub-micrometer-sized Josephson junctions together with bandage layers in a single lithography step. We also show that junction aging is significantly reduced when junction electrodes are oxidized in an oxygen atmosphere directly after deposition.
Subjects: Quantum Physics (quant-ph); Applied Physics (physics.app-ph)
DOI: 10.1088/1361-6668/ac2a6d
Cite as: arXiv:2101.01453 [quant-ph]
  (or arXiv:2101.01453v3 [quant-ph] for this version)

Submission history

From: Alexander Bilmes [view email]
[v1] Tue, 5 Jan 2021 11:08:09 GMT (1515kb,D)
[v2] Thu, 4 Feb 2021 05:29:38 GMT (1537kb,D)
[v3] Sat, 9 Oct 2021 23:13:58 GMT (1785kb,D)

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