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Astrophysics > Instrumentation and Methods for Astrophysics

Title: Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration

Abstract: Thermally activated selective topography equilibration (TASTE) enables the creation of 3D structures in resist using grayscale electron-beam lithography followed by a thermal treatment to induce a selective polymer reflow. A blazed grating topography can be created by reflowing repeating staircase patterns in resist into wedge-like structures. Motivated by astronomical applications, such patterns with periodicities 840 nm and 400 nm have been fabricated in 130 nm-thick PMMA using TASTE to provide a base for X-ray reflection gratings. A path forward to integrate this alternative blazing technique into grating fabrication recipes is discussed.
Comments: 21 pages, 8 figures, from a special edition of JVST B for the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN)
Subjects: Instrumentation and Methods for Astrophysics (astro-ph.IM); Materials Science (cond-mat.mtrl-sci)
Journal reference: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, volume 36 (2018), p. 06JA01
DOI: 10.1116/1.5048197
Cite as: arXiv:2102.12359 [astro-ph.IM]
  (or arXiv:2102.12359v1 [astro-ph.IM] for this version)

Submission history

From: Jake McCoy [view email]
[v1] Tue, 2 Feb 2021 19:30:48 GMT (1233kb)

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