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Physics > Applied Physics

Title: Picosecond Laser Ablation of Millimeter-Wave Subwavelength Structures on Alumina and Sapphire

Abstract: We use a 1030 nm laser with 7 ps pulse duration and average power up to 100 W to ablate pyramid-shape subwavelength structures (SWS) on alumina and sapphire. The SWS give an effective and cryogenically robust anti-reflection coating in the millimeter-wave band. We demonstrate average ablation rate of up to 34 mm$^3$/min and 20 mm$^3$/min for structure heights of 900 $\mu$m and 750 $\mu$m on alumina and sapphire, respectively. These rates are a factor of 34 and 9 higher than reported previously on similar structures. We propose a model that relates structure height to cumulative laser fluence. The model depends on the absorption length $\delta$, which is assumed to depend on peak fluence, and on the threshold fluence $\phi_{th}$. Using a best-fit procedure we find an average $\delta = 630$ nm and 650 nm, and $\phi_{th} = 2.0^{+0.5}_{-0.5}$ J/cm$^2$ and $2.3^{+0.1}_{-0.1}$ J/cm$^2$ for alumina and sapphire, respectively, for peak fluence values between 30 and 70 J/cm$^{2}$. With the best fit values, the model and data values for cumulative fluence agree to within 10%. Given inputs for $\delta$ and $\phi_{th}$ the model is used to predict average ablation rates as a function of SWS height and average laser power.
Comments: 15 pages, 11 figures, submitted to Optics & Laser Technology
Subjects: Applied Physics (physics.app-ph); Instrumentation and Methods for Astrophysics (astro-ph.IM); Optics (physics.optics)
Journal reference: Optics & Laser Technology, Volume 142, October 2021, 107207
DOI: 10.1016/j.optlastec.2021.107207
Cite as: arXiv:2103.06974 [physics.app-ph]
  (or arXiv:2103.06974v1 [physics.app-ph] for this version)

Submission history

From: Qi Wen [view email]
[v1] Thu, 11 Mar 2021 21:52:44 GMT (7963kb,D)

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