We gratefully acknowledge support from
the Simons Foundation and member institutions.
Full-text links:

Download:

Current browse context:

physics.optics

Change to browse by:

References & Citations

Bookmark

(what is this?)
CiteULike logo BibSonomy logo Mendeley logo del.icio.us logo Digg logo Reddit logo ScienceWISE logo

Physics > Optics

Title: Subnanometer traceability of localization microscopy

Abstract: In localization microscopy, subnanometer precision is possible but supporting accuracy is challenging, and no study has demonstrated reliable traceability to the International System of Units (SI). To do so, we measure the positions of nanoscale apertures in a reference array by traceable atomic-force microscopy, creating a master standard. We perform correlative measurements of this standard by optical microscopy, correcting position errors from optical aberrations by a Zernike calibration. We establish an uncertainty field due to localization errors and scale uncertainty, with regions of position traceability to within a 68 % coverage interval of +/- 1.0 nm. These results enable localization metrology with high throughput, which we apply to measure working standards, validating the subnanometer accuracy of lithographic pitch.
Subjects: Optics (physics.optics)
Cite as: arXiv:2106.10221 [physics.optics]
  (or arXiv:2106.10221v2 [physics.optics] for this version)

Submission history

From: Craig Copeland [view email]
[v1] Fri, 18 Jun 2021 16:48:31 GMT (2022kb)
[v2] Fri, 25 Jun 2021 19:08:30 GMT (3557kb)

Link back to: arXiv, form interface, contact.