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Physics > Optics

Title: Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane

Abstract: We demonstrate two-dimensional photonic crystal cavities operating at telecommunication wavelengths in a single-crystal diamond membrane. We use a high-optical-quality and thin (~ 300 nm) diamond membrane, supported by a polycrystalline diamond frame, to realize fully suspended two-dimensional photonic crystal cavities with a high theoretical quality factor of ~ $8\times10^6$ and a relatively small mode volume of ~2$({\lambda}/n)^3$. The cavities are fabricated in the membrane using electron-beam lithography and vertical dry etching. We observe cavity resonances over a wide wavelength range spanning the telecommunication O- and S-bands (1360 nm-1470 nm) with Q factors of up to ~1800. Our method offers a new direction for on-chip diamond nanophotonic applications in the telecommunication-wavelength range.
Subjects: Optics (physics.optics); Applied Physics (physics.app-ph)
Journal reference: Applied Physics Letters 119, 171106 (2021)
DOI: 10.1063/5.0061778
Cite as: arXiv:2106.15724 [physics.optics]
  (or arXiv:2106.15724v2 [physics.optics] for this version)

Submission history

From: Kazuhiro Kuruma [view email]
[v1] Tue, 29 Jun 2021 21:19:31 GMT (655kb)
[v2] Tue, 26 Oct 2021 16:17:48 GMT (718kb)

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