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Physics > Applied Physics

Title: Real-time sensing with multiplexed optomechanical resonators

Abstract: Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size at the cost of low capture area, making the "needle in a haystack" issue acute. This leads to poor instrument sensitivity and long analysis time. Moreover, electrical transductions are limited in frequency, which limits the achievable mechanical bandwidth again limiting throughput. Multiplexing a large number of high-frequency resonators appears as a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks resonators fabricated through a Very Large Scale Integration process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way towards the realization of sensors for multi-parametric analysis, extremely low limit of detection and response time.
Subjects: Applied Physics (physics.app-ph); Optics (physics.optics)
DOI: 10.1021/acs.nanolett.1c04017
Cite as: arXiv:2107.04484 [physics.app-ph]
  (or arXiv:2107.04484v1 [physics.app-ph] for this version)

Submission history

From: Sébastien Hentz [view email]
[v1] Fri, 9 Jul 2021 15:16:15 GMT (3165kb)

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