Title: Triple-cation perovskite solar cells fabricated by hybrid PVD/blade coating process using green solvents

Abstract: The scalability of highly efficient organic-inorganic perovskite solar cells (PSCs) is one of the remaining challenges of solar module manufacturing. Various scalable methods have been explored to strive for uniform perovskite films of high crystal quality on large-area substrates. However, each of these methods have individual drawbacks, limiting the successful commercialization of perovskite photovoltaics. Here, we report a fully scalable hybrid process, which combines vapor- and solution-based techniques to deposit high quality uniform perovskite films on large-area substrates. This two-step process does not use toxic solvents, and it further allows facile implementation of passivation strategies and additives. We fabricated PSCs based on this process and used blade coating to deposit both charge transporting layers (SnO2 and Spiro-OMeTAD) without hazardous solvents in ambient air. The fabricated PSCs have yielded open-circuit voltage up to 1.16 V and power conversion efficiency of 18.7 % with good uniformity on 5 cm x 5 cm substrates.