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Quantum Physics

Title: Aluminum air bridges for superconducting quantum devices realized using a single step electron-beam lithography process

Abstract: In superconducting quantum devices, air bridges enable increased circuit complexity and density as well as mitigate the risk of microwave loss arising from mode mixing. We implement aluminum air bridges using a simple process based on single-step electron-beam gradient exposure. The resulting bridges have sizes ranging from $20~\mu m$ to $100~\mu m$, with a yield exceeding $99~\%$ for lengths up to $36~\mu m$. When used to connect ground planes in coplanar waveguide resonators, the induced loss contributed to the system is negligible, corresponding to a reduction of the quality factor exceeding $1.0\times10^8$ per bridge. The bridge process is compatible with Josephson junctions and allows for the simultaneous creation of low loss bandages between superconducting layers.
Comments: 5 pages, 4 figures
Subjects: Quantum Physics (quant-ph)
Cite as: arXiv:2206.09489 [quant-ph]
  (or arXiv:2206.09489v1 [quant-ph] for this version)

Submission history

From: Noah Janzen [view email]
[v1] Sun, 19 Jun 2022 21:33:28 GMT (4524kb)

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