Title: Physics-guided neural networks for feedforward control with input-to-state stability guarantees

Abstract: Currently, there is an increasing interest in merging physics-based methods and artificial intelligence to push performance of feedforward controllers for high-precision mechatronics beyond what is achievable with linear feedforward control. In this paper, we develop a systematic design procedure for feedforward control using physics-guided neural networks (PGNNs) that can handle nonlinear and unknown dynamics. PGNNs effectively merge physics-based and NN-based models, and thereby result in nonlinear feedforward controllers with higher performance and the same reliability as classical, linear feedforward controllers. In particular, conditions are presented to validate (after training) and impose (before training) input-to-state stability (ISS) of PGNN feedforward controllers. The developed PGNN feedforward control framework is validated on a real-life, high-precision industrial linear motor used in lithography machines, where it reaches a factor 2 improvement with respect to conventional mass-friction feedforward.