Title: Heterogeneous integration of superconducting thin films and epitaxial semiconductor heterostructures with Lithium Niobate

Abstract: We report on scalable heterointegration of superconducting electrodes and epitaxial semiconductor quantum dots on strong piezoelectic and optically nonlinear lithium niobate. The implemented processes combine the sputter-deposited thin film superconductor niobium nitride and III-V compound semiconductor membranes on the host substrate. The superconducting thin film is employed as a zero-resistivity electrode material for a surface acoustic wave resonator with internal quality factors $Q_i > 16000$. Superconducting operation of $\approx 400\,\mathrm{MHz}$ resonators is achieved to temperatures $T>7\mathrm{K}$ and electrical radio frequency powers $P_{\mathrm{rf}}>+9\,\mathrm{dBm}$. Position and frequency selective coupling of single quantum dots heterogeneously integrated within the resonant phononic field of the surface acoustic wave resonator is validated using time-integrated and time-resolved optical spectroscopy. These experiments confirm deformation coupling as the dominant coupling mechanism. Finally, acousto-electric charge state control is achieved in a modified device geometry in which the large piezoelectric fields strongly couple to the semiconductor. The implemented hybrid quantum dot - surface acoustic wave resonator can be scaled to higher operation frequencies and smaller mode volumes to realize quantum phase modulation and transduction between photons and phonons via the quantum dot. Finally, the employed materials allow for the implementation of other types of optoelectronic devices, including superconducting single photon detectors and integrated photonic and phononic circuits.