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Quantum Physics
Title: Simple coplanar waveguide resonator mask targeting metal-substrate interface
(Submitted on 14 Apr 2022)
Abstract: This white paper presents a single-layer mask, found at this https URL It is designed for fabrication of superconducting microwave resonators towards 1:1 comparisons of dielectric losses from the metal-substrate interface. Finite-element electromagnetic simulations are used to determine participation ratios of the four major regions of the on-chip devices, as well as to confirm lack of crosstalk between neighboring devices and demonstrate coupling tunability over three orders of magnitude. This mask is intended as an open-source community resource for facilitating precise and accurate comparisons of materials in the single-photon, millikelvin regime.
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