Title: CALPHAD-based modelling of the temperature-composition-structure relationship during physical vapor deposition of Mg-Ca thin films

Abstract: The temperature-dependent composition and phase formation during physical vapor deposition (PVD) of Mg-Ca thin films is modelled using a CALPHAD-based approach. Considering the Mg and Ca sublimation fluxes calculated based on the vapor pressure obtained by employing equilibrium thermochemical calculations, experimentally observed synthesis temperature trends in thin film composition and phase formation are reproduced. The model is a significant step towards understanding how synthesis parameters control composition and thereby phase formation in PVD of metals with high vapor pressures.