Title: Strong substrate influence on atomic structure and properties of epitaxial VO2 thin films

Abstract: The metal-insulator transition (MIT) observed in vanadium dioxide (VO2) has been a topic of great research interest for past decades, with the underlying physics yet not fully understood due to the complex electron interactions and structures involved. The ability to understand and tune the MIT behaviour is of vital importance from the perspective of both underlying fundamental science as well as potential applications. In this work, we use scanning transmission electron microscopy (STEM) to investigate cross-section lamella of the VO2 films deposited using pulsed laser deposition (PLD) on three substrates: c-cut sapphire, TiO2(101) and TiO2(001). Advanced STEM imaging is performed in which also the oxygen atom columns are resolved. We link the overall film quality and structures on atomic and nanoscale to the electrical transition characteristics. We observe poor MIT characteristics on c-sapphire due to the presence of very small domains with six orientation variants, and on TiO2 (001) due to the presence of cracks induced by stress relaxation. However, the MIT on TiO2 (101) behaves favourably, despite similar stress relaxation which, however, only lead to domain boundaries but no cracks.