Title: Characterisation of the primary X-ray source of an XPS microprobe Quantum 2000

Abstract: The outstanding design feature of an XPS microprobe Quantum 2000 is the double focussing ellipsoidally shaped quartz monochromator of the X-ray source. This device monochromatizes the Alk{\alpha} radiation and refocuses the X-rays from the Al anode to the sample surface. This way, on one hand a variation of the diameter of the X-ray generating electron beam allows to vary the X-ray beam diameter on the sample surface. On the other hand a scanning of the electron beam across the Al anode scans the X-ray beam across the sample surface. The X-ray source was characterized in detail. The lateral dependency of the primary X-ray intensity and the peaks FWHM were measured as function of the position within the electrostatically rasterable scan area. Additionally, the focussing quality of the monochromator was determined. Therefore the lateral intensity distribution within the primary X-ray beam was estimated far below the 1% intensity level.